This year’s edition was kicked off with a keynote presentation from ASML fellow Jan van Schoot on high-NA lithography (Numerical Aperture), the exciting next step for the industry.
The Source Workshop was organized and hosted by ARCNL and EUV Litho. If you have questions, please contact Oscar Versolato (email: O.Versolato@arcnl.nl, group leader of EUV Plasma Processes – ARCNL).